Laser/E-Beam Photomasks

2 Core 2564 Laser Writers

  • 7”x7”x .250” Maximum plate size
  • 6.4”x 6.4” Maximum write area
  • .025um addressable resolution
  • .8um feature size
  • .05um overlay

1 Mebes III E-Beam

  • 7”x7”x .250” Maximum plate size
  • 6.2”x 6.2” Maximum write area
  • .020um addressable resolution
  • 0.60um feature size
  • .1um overlay

1 ALTA 3900

  • 9”x9”x .250” Maximum plate size
  • 8.3”x 8.3” Maximum write area
  • .005um addressable resolution
  • 0.60um feature size
  • .060um overlay