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Laser / E-Beam Photomasks
2 Core 2564 Laser Writers
• 7"x7"x .250" Maximum plate size
• 6.4"x 6.4" Maximum write area
• 0.025um addressable resolution
• 0.8um feature size
• 0.05um overlay
1 Mebes III E-Beam
• 7"x7"x .250" Maximum plate size
• 6.2"x 6.2" Maximum write area
• 0.1um addressable resolution
• 1.0um feature size
• 0.1um overlay
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