|
|
Large Area Photomasks
MICRONIC MP80+ LARGE-AREA MASK WRITER
• 32" x 32" Plate Size
• 3 micron minimum feature size
• H & E-Line capabilities
• Accepts GDSII, DXF, Gerber, MANN, MEBES, E-Mask, DWG, Postscript
MICRONIC LRS-600 LARGE-AREA MASK WRITER
• 24" x 24" Plate Size
• 6 micron minimum feature size
• H & E-Line capabilities
• Accepts GDSII, DXF, Gerber, MANN, MEBES, E-Mask, DWG, Postscript
2 LARGE-AREA IMAGE REPEATING SYSTEMS
• 4" x 4" to 24" x 24" plate size
• 4.5" x 4.5" maximum die size
• 18" x 18" stepping area
• 1X Projection System
• 10 micron minimum feature size
• H-Line capability
LUMINA LARGE-AREA PRECISION MEASURING SYSTEM
• Accepts substrates up to 20" x 24"
• Fully automatic measuring
• 0.1 micron standard resolution
• Video coordinate system with image data output
|
|
|
